Automatic Nanoimprinter

Product mainMain Functions:

1.Imprinting Mode: UV nanoimprint lithography (NIL), with heating support;

2. The equipment adopts a flexible film as the template substrate. The template is stretched flat by a tension mechanism, and the tension is adjustable;

3. The exposure light source is a 365nm UV LED light source, which has high light intensity and uniform light intensity distribution;

4. High imprinting uniformity and high aspect ratio;

5. The equipment is equipped with 1 set of high-efficiency FFU (Fan Filter Unit) filter, and the internal cleanliness reaches Class 100 or above;

6. The equipment is configured with control software. It can store no less than 50 sets of process parameters; it can realize automatic sample feeding, roll pressing, exposure and demolding, and all process parameters are adjustable.

Product main technical parameters：